類LIGA製程應用於靜電式微馬達光開關之研製

Abstract

本研究採用厚膜光阻製程與微電鑄技術之UV-LIGA製程，製作出低成本之微光開關元件。實驗結果顯示SU-8光阻可為光開關之結構材料，達到簡化製程、降低成本的目的。製作完成的微光開關結構實體之可動結構於釋放後，將針對靜電式致動器的驅動性能予於測試。再者，亦將針對微反射鏡的光學反射品質與光路切換的響應速率作評估分析。

We used UV-LIGA process which combined thick resists and electroplating process to manufacture the low costed optical switch. The results show photoresist has been demonstrated to be the material of the optical switch successfully. The optical switch we manufactured will test firstly the driving proterties when the moving structures released. The next, we will test the optical reflected quality of the optical switch and analyze the switching response ratio of the optical path.