奈米記錄點的動態寫入與量測研究

Abstract

在本論文中，使用動態測試儀 (Dynamic Optical Disk Tester) 量測以ZnS-SiO2包夾初鍍態Ge2Sb2Te5相變化材料光碟之載子訊雜比 (Carrier-to-Noise Ratio，CNR)，可以量測到光學解析極限以下記錄點之載子訊雜比。研究為何無光學非線性作用層之碟片仍可解析光學解析極限以下記錄點，使用動態測試儀在平坦碟片上寫下光學解析極限以下尺寸之記錄點，再以原子力顯微儀 (Atomic Force Microscope，AFM ) 掃描其表面形貌發現寫下一週期性結構，其週期為記錄點兩倍。使用動態測試儀讀取記錄點時，是讀取光強度隨時間變化的連續過程，所以當動態測試儀讀取此週期性結構時便可量測到對應之載子訊雜比，同時我們也研究此週期性結構之形成原因。In this thesis, Carrier-to-Noise Ratio (CNR) of different mark sizes is measured by a dynamic optical disk driver tester. The layer structure of phase-change disk is as-deposited Ge2Sb2Te5 sandwiched by ZnS-SiO2. CNR measurement shows that recording marks beyond the spatial resolution limit can be readout. We use dynamic optical disk driver tester to record recording marks beyond the spatial resolution limit on plane phase-change thin film. The topography images of recording marks are scanned by Atomic Force Microscope (AFM), and AFM images indicate that recording marks beyond spatial resolution are periodic structures. In CNR measurement, the laser pick-up head of dynamic optical disk driver tester receive the change of reflective laser beam with time. When the periodic structures are read by laser pick-up head, the Carrier-to-Noise Ratio can be readout. The process of periodic structure formation is well studied.