全 SU-8 厚膜光阻之靜電式微夾持器研製

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dc.contributor國立臺灣師範大學機電工程學系zh_tw
dc.contributor.author楊啟榮zh_tw
dc.contributor.author程金保zh_tw
dc.contributor.author王服賢zh_tw
dc.contributor.author張峻銘zh_tw
dc.contributor.author施建富zh_tw
dc.date.accessioned2014-10-30T09:36:19Z
dc.date.available2014-10-30T09:36:19Z
dc.date.issued2005-11-25zh_TW
dc.identifierntnulib_tp_E0403_02_028zh_TW
dc.identifier.urihttp://rportal.lib.ntnu.edu.tw/handle/20.500.12235/36991
dc.languagechizh_TW
dc.relation2005 中國機械工程學會（CSME）第22屆全國學術研討會，E1-007，中壢：中央大學，臺灣。zh_tw
dc.subject.otherSU-8厚膜光阻zh_tw
dc.subject.other釋放技術zh_tw
dc.subject.other靜電式微夾持器zh_tw
dc.title全 SU-8 厚膜光阻之靜電式微夾持器研製zh_tw

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