氧化鋅奈米光碟片的製作與量測研究

Abstract

在本論文中，首先以光碟測試機量測不同厚度與不同氬氧比例的氧化鋅(ZnOx)近場超解析結構光碟片的載子雜訊比(CNR ,Carrier to Noise Ratio)，在光學的解析極限下，可以量測寫入長度100nm的記錄點，其載子雜訊比可達到27.97 dB。為了更進一步了解氧化鋅奈米膜層結構中光與膜層的交互作用，我們分層去做探討，利用光譜顯微儀與掃描式電子顯微鏡(SEM)與原子力顯微鏡(AFM)來觀察氧化鋅奈米薄膜的變化。也利用靜態測試儀(pump-probe laser system)量測在不同時間下雷射功率在氧化鋅奈米膜層上所造成的影響，並比較獲得的CCD影像與穿透式電子顯微鏡(TEM)圖。

In this thesis, we first measure the carrier to noise ratio (CNR) of different thickness and different Ar/O2 flow ratio of ZnOx near-field structure optical recording discs by DVD driver tester. Within the resolving limit of optics, the best CNR about 27.97dB at the recording marks of 100nm can be measured. In order to do justice to the optical interactions on ZnOx nano thin films, we analyze with the layers and make use of spectral photometer, scanning electron microscope (SEM), and transmission electron microscope (TEM) to observe the transformation of ZnOx nano thin films. The power dependence and response time of the optical reaction are measured by an optical static tester, and compare the CCD images and TEM images.