多波長與圓極化窄頻紅外光熱輻射之設計

Abstract

本論文研究工作於中紅外波段(4-10μm)的熱輻射元件，基於金屬/介電質/金屬三明治堆疊結構，探討不同的金屬線寬大小與介電質材料之折射率對於熱輻射波長的調控，成功實現多波長熱輻射發射器。此雙層三明治結構由不對稱十字形金屬結構結合二氧化矽與二氧化鈦兩種介電材料交錯堆疊所組成，首先經由模擬計算設計來金屬/介電質/金屬共振腔中的磁共振波長，此雙層不對稱十字形堆疊結構可激發多個侷域型表面電漿子共振，並在x和y偏振光入射下，具不同的共振模態與頻譜特徵；再藉由黃光製程製作出樣品，根據實驗結果成功量測到五個窄頻熱輻射發射峰，並由於侷域型表面電漿子共振的特性使得量射所得之熱輻射不具色散並展現其偏振相依性，可藉由偏振片來調控發射波長。此外，由於具左右旋圓極化熱輻射發射器有助於在分子化學鍵的旋性分析檢測，基於金屬/介電質/金屬堆疊結構設計，本文從模擬計算深入探討上層矩形金屬天線在不同厚度的介電質層下，天線結構參數對應的相位變化，並優化出兩組最佳效率具有圓極化之紅外熱輻射發射器。本論文研究之多波長與圓極化中紅外熱輻射發射器可作為光源整合至中紅外波段光學檢測系統中，提供檢測多波段紅外輻射信號、提升分子識別的準確性並可應用於特定旋性分子檢測。This dissertation researches on heat radiation elements in the mid-infrared band (4-10μm), based on the metal/dielectric/metal sandwich stack structure, and explores the different metal line widths and the refractive index of dielectric materials with respect to the wavelength of heat radiation. Controlled and successfully implemented a multi-wavelength thermal radiation emitter. This double-layer sandwich structure is composed of an asymmetric cross-shaped metal structure combined with two dielectric materials of silicon dioxide and titanium dioxide. The magnetic resonance wavelength in the metal/dielectric/metal resonant cavity is first designed through simulation calculations. The double-layer asymmetric cross-shaped stacked structure can excite multiple localized surface plasmon resonances, and have different resonance modes and spectral characteristics under the incidence of x and y polarized light; then samples are made by the yellow light process According to the experimental results, five narrow-band thermal radiation emission peaks have been successfully measured. Due to the characteristics of localized surface plasmon resonance, the thermal radiation obtained by the measurement has no dispersion and exhibits polarization dependence. Polarizers can be used To adjust the emission wavelength. In addition, because the left and right-handed circularly polarized thermal radiation transmitter is helpful in the analysis and detection of the spinality of molecular chemical bonds, based on the metal/dielectric/metal stack structure design, this article discusses the upper rectangular metal antenna in different thicknesses from simulation calculations. Under the dielectric layer of, the phase changes corresponding to the antenna structure parameters, and optimized two sets of infrared heat radiation emitters with the best efficiency and circular polarization. The multi-wavelength and circular polarization mid-infrared thermal radiation emitter studied in this paper can be used as a light source to be integrated into the mid-infrared optical detection system, providing detection of multi-band infrared radiation signals, improving the accuracy of molecular recognition and being applied to specific rotation Molecular detection.