數位全像顯微術及其光學元件量測應用之研究

Abstract

本文主要在探討數位全像顯微術的原理、特性及其光波量測上的應用。 本研究工作首先架設相移式無鏡成像數位全像顯微系統以量測微透鏡陣列的三維輪廓。 同時，利用此系統具有較廣的視角來量測液晶空間光調制器之振幅與相位調制特性。 為了提高數位全像顯微的空間解析度，本研究工作亦架設了相移式透鏡成像顯微系統架構，其解析度約達次微米，因而可用來分析更細微物體結構。結合此透鏡成像顯微鏡與雙埠干涉架構下，本研究同時探討光波偏振態量測之可行性，並應用之於空間光調制器之液晶晶胞偏振狀態之量測與分析。 本研究驗證了數位全像顯微術具有完整存取物體光波的振幅、相位與偏振資訊的潛力。 內文中將提出相關的實驗結果與說明。

This work investigates the principles, properties of the digital holographic microscopy (DHM) and its applications on optical information sensing and measurement. First, this research construct a phase-shifting digital holographic microscope system with lensless imaging configuration to measure the three-dimension profile of a microlens array. Also, the DHM apparatus is applied to measure the phase and amplitude modulation of the liquid crystal spatial light modulators by means of the large angle of view. Then, we also try to equip the DHM system with an objective to achieve better spatial resolution down to submicrometer, so that the finer structure of specimen cab be further observed. In addition, by combining the DHM inaging and double-port interferometric technique, this work can study the possibility of sensing the polarization state of optical wave transmitted from the specimen. This polarization-sensitive cabibility are used to detect the polarization modulation of the liquid crystal devices. This work demonstrate that the digital holographic microscopy has great potential to completely detect the amplitude, phase and polarization information of object wavefronts. The analytical and experimental results are presented and discussed.