新興光電技術的剖析與智權佈局：聚焦在電子束蒸鍍製作異質接面結構太陽能電池技術、紅外線感測技術

Abstract

本論文主要是在研究新興光電技術應用中二種關鍵光電元件及其相關專利之智權分布概況。這兩種光電元件，一為太陽能電池，另一為紅外線光感測器。首先，我們所研究的太陽能電池是以具本質薄膜層之異質接面太陽電池(Heterojunction with Intrinsic Thin layer，簡稱HIT)為主題，我們採用電子束蒸鍍機製作新型之異質接面矽基太陽能電池。研究結果發現在切割損傷去除蝕刻流程和450°C形成氣體退火之製程後，可有效的改善短路電流及開路電壓。相較於傳統的PECVD設備，可降低製程設備成本。基於上述之優點，將該製程技術進一步來申請專利，並透過專利申請之實務過程中了解該製程技術的可專利性。目前已取得相關專利包含中華民國新型專利、中華民國發明專利及日本發明專利共三篇。再來，我們針對紅外線光感測器之應用來做介紹，分別以三維光達（3D LiDAR）及大氣遙測光達(Gas mapping LiDAR）來進行說明。最後，我們以類似專利佈局的觀點來研究此兩種光電元件的全球專利申請狀況。從全球專利檢索發現，HIT太陽電池的專利申請以發明專利為最主要申請類型，佔全球申請量之89%，申請國家以中國大陸為主要。IPC技術分類可以發現，技術顯著集中在H01L類上，大部分的技術歸屬在H01L31/00上。關於三維光達(3D LiDAR)技術方面，有相當大的比重是通過發明專利進行保護，全球統計發明專利佔所有專利比重的95.8%。中國大陸是最主要的申請國。大氣遙測光達(Gas mapping LiDAR）方面，發明專利佔所有專利比重的83%，全球大氣遙測光達專利以申請人排名來看，在排名前十五的專利申請人中有，6個來自中國大陸、5個來自美國，2個來自德國，韓國和沙烏地阿拉伯各1。台灣有合作參與共計有2件，均歸屬於來自美國的專利。依據2020年版的IPC專利分類，與大氣遙測光達(Gas mapping LiDAR）最相關的技術前十位中有7項專利歸類在G類，並以G01、G05與G06等類別的專利數量為最多。This paper focuses on two key optoelectronic components, namely solar cells and infrared light sensors, in emerging optoelectronic technology applications and the intellectual property rights allocated to them. First, we study the heterojunction with intrinsic thin layer (HIT). We then use an electron beam evaporation machine to produce a new type of heterojunction silicon-based solar cell.The etching process for cutting damage removal and the gas annealing process at 450°C are found to improve short circuit current and open circuit voltage.Moreover, the process equipment cost can be reduced compared to the cost when conventional PECVD equipment is used. Based on the above-mentioned advantages, the process technology was patented; the patentability of the process technology was determined through the practical process of patent application.Currently, we have obtained three patents: the Republic of China (R.O.C.) Utility Model Patent , the Republic of China (R.O.C.) Invention Patent, and the Japanese Invention Patent.We then introduce the applications of infrared light sensors and illustrate them with 3D LiDAR and gas mapping LiDAR.Finally,we examine the global patent application status of these two optoelectronic components from a similar patent landscape perspective.From the global patent search, it can be found that patent applications for HIT solar cells are mainly for “invention patents,” accounting for 89% of the global applications. Among the main countries where applications were received was Mainland China.According to the IPC technology classification, the technology is significantly concentrated in the H01L category, with the majority of the technology attributed to H01L31/00.A significant proportion of 3D LiDAR technology is protected by patents for inventions.Globally, patents for inventions account for 95.8% of all patents.Mainland China is the most important country for receiving applications.In terms of the number of patents, the number of inventions accounted for 83% of the total number of patents for gas mapping LiDAR. In terms of the global ranking of the applicants of the patents for gas mapping LiDAR, among the top 15 patent applicants, six were from Mainland China, five from the United States, two from Germany, one from Korea, and one from Saudi Arabia.There were two patent applications in which Taiwan collaborated; both of them were attributed to patents from the United States.According to the 2020 version of the IPC patent classification, among the top ten technologies most relevant to gas mapping LiDAR, seven patents are classified in category G, with the largest number of patents in categories G01, G05, and G06.