矽上絕緣層矽晶元件應用在光學讀取系統之研究

Abstract

本文提出利用矽上絕緣層矽晶元件建立光學讀取系統結合多模干涉型光學能隙波導光分歧器及光子晶體Mach-Zehnder結構。我們利用二維光子晶體週期性結構及線狀缺陷的技術並針對不同的能隙結構來控制光在光子晶體波導中行進的路徑，以便達到縮小積體光學元件之體積。多模干涉型光學能隙波導光分歧器是基於自成像現象設計而成。我們利用自成像現象在矽上絕緣層矽晶脊狀光波導設計多模干涉光分歧器並進一步研究自成像現象在光子晶體傳播情形來設計光學能隙波導光分歧器。此外，我們利用六角形晶格光子晶體的Mach-Zehnder結構來達成干涉現象，並藉此設計光學讀寫系統。

In this thesis, we design optical pickup head system by MMI-based PBG waveguide optical splitter with a square-lattice photonic crystal and Mach-Zehnder structure with a hexagonal-lattice photonic crystal building on SOI wafer. MMI-based PBG waveguide optical splitter with a square-lattice photonic crystal is based on self-image phenomenon. We design the device according to the self-image phenomenon in MMI optical splitter based on SOI rib waveguide. We use the technique of photonic bandgap and line defect to control the direction of the light wave propagation in a waveguide. Besides, Mach-Zehnder structure with a hexagonal-lattice photonic crystal is also used to design as an interferometer.