微共振腔鈣鈦礦量子點異質接面光偵測器元件之特性探討

Abstract

本篇最初使用化學氣象沉積法製作鈣鈦礦層，將鈣鈦礦作為增益介質，結合一個P型材料氧化鎳和一個N型材料氧化鋅製作成光偵測器，並加入金屬電極銀和布拉格反射鏡形成塔米電漿結構。由於本實驗利用化學氣象沉積法製作的鈣鈦礦層無法達成COMSOL模擬所需的厚度，因此改由熱注入法來製作，將鈣鈦礦層變成量子點的型態。 熱注入法製作出的鈣鈦礦量子點彼此間有許多的不連續的邊界，因此我們利用PMMA溶液覆蓋於鈣鈦礦層上方，不但填補了鈣鈦礦量子點裡晶粒間的空缺，也可以避免上方的氧化鋅與下方的氧化鎳接觸。量測方面利用COMSOL模擬了解該結構的低反射模態位置，並使用470 nm的LED作為光訊號來源使鈣鈦礦層產生光電流，最後比較有無布拉格反射鏡對鈣鈦礦光偵測器的影響。In this experiment, the perovskite layer are used as the gain medium that make by the chemical vapor deposition method at first, and then combine with the P-type material NiO and the N-type material ZnO are made into the photodetector. The photodetector adds metal electrode and distributed bragg reflector to form the Tamm plasma structure. The perovskite layer is made by chemical vapor deposition can’t achieve the thickness required by COMSOL simulations, so we transform the perovskite layer into the form of two-dimensional quantum dots are made by thermal injection method.The perovskite quantum dots have pretty much grain boundary between each other, so we use the PMMA solution that cover on the top of them. Not only fill the hole between the perovskite quantum dots, but avoid the NiO layer which under the perovskite and the ZnO layer which on the perovskite are contact. In the measurement, we use the COMSOL simulation to know where low- reflection mode in that structure, and use 470 nm LED as optical signal to let perovskite product the photocurrent. Finally, compare the effect of the perovskite photodector structure with and without the DBR.