真空鍍膜技術簡介--濺鍍技術(sputtering)

dc.contributor國立臺灣師範大學機電工程學系zh_tw
dc.contributor.author張秉書zh_tw
dc.contributor.author程金保zh_tw
dc.contributor.author楊燿瑜zh_tw
dc.date.accessioned2014-10-30T09:36:00Z
dc.date.available2014-10-30T09:36:00Z
dc.date.issued2002-07-01zh_TW
dc.identifierntnulib_tp_E0401_01_004zh_TW
dc.identifier.issn1024-3895zh_TW
dc.identifier.urihttp://rportal.lib.ntnu.edu.tw/handle/20.500.12235/36790
dc.languagechizh_TW
dc.publisher全亞文化事業有限公司zh_tw
dc.relation機械技術雜誌,209,163-176。zh_tw
dc.subject.other濺鍍zh_tw
dc.subject.other真空鍍膜技術zh_tw
dc.title真空鍍膜技術簡介--濺鍍技術(sputtering)zh_tw

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